Covered work
Material : Silicon, GaAs
Size : Minimum Φ12.5mm, Maximum Φ100mm
Method of fixation : Possible fixation by mechanical holding part
Replica mold
Material : PDMS thermoplastic resin
Size : Φ12.5mm
Method of fixation : Possible fixation by mechanical holding part
Transfer mechanical section
Drive source : Pulse motor
Load sensor : Piezoelectric element (Resolution 1N)
Possible set up to maximum 1kN
Load setting parameter input (Maximum 1kN)
Pressurization resolution : 0.1um